"A method for focus correction may be provided. The method may include receiving a desired focus error correction measure and altering, at a rate that exceeds a first rate and in response to the desired focus error correction measure, at least one focusing function out a first focusing function and a second focusing function; wherein the first rate is faster than a rate of distance alteration applied by a mechanical module arranged to alter the distance between an inspected object and a sensor; wherein the first focusing function is applied along a first direction by a first focusing unit; wherein the second focusing function is applied by a traveling lens acousto-optic device that is arranged to generate a plurality of traveling lenses in response to radio frequency signals; and wherein each traveling lens is arranged to receive at least a portion of the second beam and to apply the second focusing function along a second direction to generate a plurality of focused spots.
"A method may be provided. The method may include altering, by a mechanical module, a distance between an inspected object and a sensor at a rate that is lower than a first rate; receiving, by a first focusing module, a first beam and applying a first focusing function along a first direction to provide a second beam; generating, by a traveling lens acousto-optic device, a plurality of traveling lenses in response to radio frequency signals; receiving, by each traveling lens at least a portion of the second beam; applying, by each traveling lens, a second focusing function along a second direction to generate a plurality of focused spots; directing the plurality of focused spots on the inspected object; directing radiation from the inspected object to a sensor; sensing radiation that impinges on the sensor; altering the first focusing function at a rate that exceeds the first rate; and altering the second focusing function at a rate that exceeds the first rate.
"A method for changing focus may be provided. The method may include receiving a first light beam through an input facet of a core made of ultraviolet durable material, wherein refractive indices of the core are responsive to an electric field applied on the core; inducing, by a first set of electrodes that is connected to a first facet of the core that differs from the input facet, an electrical field having a magnitude that has a substantially parabolic shape along a first direction thereby causing the core to apply a first focusing function along the first direction on the first light beam, wherein the first direction is oriented to a propagation direction of the first light beam; and performing a fast change in the electrical field induced by the first set of electrodes thereby performing fast changes in the first focusing function."
For additional information on this patent, see: Feldman, Haim; Morgenstein,
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