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New Applied Surface Science Study Findings Have Been Reported by Researchers at Institute of Electrical Engineering (Patterning of titanium oxide...

September 12, 2014



New Applied Surface Science Study Findings Have Been Reported by Researchers at Institute of Electrical Engineering (Patterning of titanium oxide surfaces using inductively coupled plasma for gas sensing)

By a News Reporter-Staff News Editor at Science Letter -- Current study results on Science have been published. According to news reporting originating in Bratislava, Slovakia, by NewsRx journalists, research stated, "Titanium oxide thin films were deposited at room temperature by reactive magnetron sputtering in a mixture of oxygen and argon on oxidized silicon substrates. The optimal etching characteristics of TiO2 films by an inductively coupled plasma system were investigated."

The news reporters obtained a quote from the research from the Institute of Electrical Engineering, "The maximum etch rate of TiO2 was 104 nm/min at fixed 200W of ICP power and the highest investigated value of RF chuck power of 150W. Patterning of TiO2 tip arrays by electron beam lithography and dry etching was conducted. Experimental results showed that the exposure dose optimization was a significant parameter for controlling the tip size and its shape. Pyramidal TiO2 tip arrays were successfully fabricated by dry etching in CF4/Ar plasma through a Au nanoparticle mask."

According to the news reporters, the research concluded: "The TiO2 tip arrays can be expected to have an important application in gas microsensors."

For more information on this research see: Patterning of titanium oxide surfaces using inductively coupled plasma for gas sensing. Applied Surface Science, 2014;312():107-111. Applied Surface Science can be contacted at: Elsevier Science Bv, PO Box 211, 1000 Ae Amsterdam, Netherlands. (Elsevier - www.elsevier.com; Applied Surface Science - www.elsevier.com/wps/product/cws_home/505669)

Our news correspondents report that additional information may be obtained by contacting I. Hotovy, Slovak Academy Sci, Inst Elect Engn, Bratislava 84507, Slovakia. Additional authors for this research include I. Kostic, S. Hascik, V. Rehacek, M. Predanocy and A. Bencurova (see also Science).

Keywords for this news article include: Bratislava, Slovakia, Europe, Light Metals, Science, Titanium

Our reports deliver fact-based news of research and discoveries from around the world. Copyright 2014, NewsRx LLC


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Source: Science Letter


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