News Column

Reports from SRM University Provide New Insights into Applied Surface Science (Resist materials for proton beam writing: A review)

August 15, 2014



By a News Reporter-Staff News Editor at Science Letter -- Fresh data on Science are presented in a new report. According to news originating from Tamil Nadu, India, by NewsRx correspondents, research stated, "Proton beam writing (PBW) is a lithographic technique that has been developed since the mid 1990s, initially in Singapore followed by several groups around the world. MeV protons while penetrating materials will maintain a practically straight path."

Our news journalists obtained a quote from the research from SRM University, "During the continued slowing down of a proton in material it will mainly interact with substrate electrons and transfer a small amount of energy to each electron, the induced secondary electrons will modify the molecular structure of resist within a few nanometers around the proton track. The recent demonstration of high aspect ratio sub 20 nm lithography in HSQ shows the potential of PBW. To explore the full capabilities of PBW, the understanding of the interaction of fast protons with different resist materials is important. Here we give an update of the growing number of resist materials that have been evaluated for PBW. In particular we evaluate the exposure and development strategies for the most promising resist materials like PMMA, HSQ, SU-8 and AR-P and compare their characteristics with respect to properties such as contrast and sensitivity. Besides an updated literature survey we also present new findings on AR-P and PMGI resists. Since PBW is a direct write technology it is important to look for fast ways to replicate micro and nanostructures. In this respect we will discuss the suitability and performance of several resists for Ni electroplating for mold fabrication in nano imprint technologies."

According to the news editors, the research concluded: "We will summarize with an overview of proton resist characteristics like sensitivity, contrast, aspect ratio and suitability for electroplating."

For more information on this research see: Resist materials for proton beam writing: A review. Applied Surface Science, 2014;310():100-111. Applied Surface Science can be contacted at: Elsevier Science Bv, PO Box 211, 1000 Ae Amsterdam, Netherlands. (Elsevier - www.elsevier.com; Applied Surface Science - www.elsevier.com/wps/product/cws_home/505669)

The news correspondents report that additional information may be obtained from J.A. van Kan, SRM Univ, Res Inst, Madras 603203, Tamil Nadu, India. Additional authors for this research include P. Malar and Y.H. Wang (see also Science).

Keywords for this news article include: Asia, India, Science, Tamil Nadu

Our reports deliver fact-based news of research and discoveries from around the world. Copyright 2014, NewsRx LLC


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Source: Science Letter


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