Eyelit Manufacturing RMS™ coordinates dynamic equipment recipes for automation and advanced process control (APC)
Automation has become critical for high-tech manufacturers due to the complexity of tight specifications, a high mix of products, fast cycle times, and a need to maximize overall equipment effectiveness (OEE). Eyelit’s RMS helps enforce precision automation that prevents mistakes, increases throughput and yield, and adjusts processing to prolong the time between required maintenance activities.
The RMS module extends the capabilities of Eyelit Manufacturing MES™ to enforce and coordinate feed-forward and feed-back adjustments to the detailed settings of equipment recipes at a processing step. The version-controlled instructions in the Manufacturing Execution System (MES) store the process program identifier (PPID) and system variable identifiers (SVIDs) within them, at each step of a process with automated equipment. The PPIDs, SVIDs, child equipment, and chambers of cluster tools can be managed as variables with override capability at the process, product, lot, and unit (e.g., wafer) levels. The value of each variable is downloaded to each equipment controller when automating through Eyelit Integration FactoryConnect™ to enforce proper processing of the material, and values of parameters collected may be passed back to the MES.
The system also supports integration with APC controllers and their sophisticated algorithms for Run-to-Run (R2R) Control adjustments of SVID variables as lots and batches are processed. It is also capable of exchanging SVID variables with APC, which has in-situ controls for unit-to-unit (e.g., wafer-to-wafer) adjustments of SVID variables as material moves between chambers within cluster tools.
“Manufacturers of semiconductors, life sciences products and other precision electronics are increasingly automating production equipment with process controls to improve product quality and productivity, drive overall factory efficiency, and lower manufacturing costs,” stated
With exceptional customer service, Eyelit has time and again proven that superior innovative technology can maximize efficiency and value. More than 50 leading companies, including Ascent Solar, JSC Angstrem-T, austriamicrosystems, BinOptics, CEA-Leti, CEITEC, eMagin, FLIR Systems, Freescale Semiconductor, Kionix, M/A-COM Technology Solutions, Mentor Graphics,
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