News Column

Patent Issued for Substrate Processing Apparatus

August 27, 2014



By a News Reporter-Staff News Editor at Electronics Newsweekly -- From Alexandria, Virginia, VerticalNews journalists report that a patent by the inventors Nogami, Shigeki (Toyama, JP); Funakura, Mitsuru (Toyama, JP); Teranishi, Isao (Toyama, JP); Yashima, Tsukasa (Imizu, JP); Ekko, Hiroshi (Toyama, JP), filed on October 2, 2007, was published online on August 12, 2014.

The patent's assignee for patent number 8806370 is Hitachi Kokusai Electric Inc. (Tokyo, JP).

News editors obtained the following quote from the background information supplied by the inventors: "The present invention relates to a substrate processing apparatus which processes a semiconductor substrate, a glass substrate, or the like.

"This kind of substrate processing apparatus is controlled based on an operation recipe, which includes a plurality of processes and the like, under prescribed control parameters and apparatus parameters. These kinds of operation recipe and apparatus parameters are edited, via a prescribed editing screen, by a user who has an editing authority.

"JP-A-11-195573 discloses a semiconductor processing apparatus which, including a plurality of processing rooms, feeds a wafer, which is a subject of a processing, through the plurality of processing rooms, and executes a plurality of differing processes on the wafer, the apparatus displaying an operation recipe compilation screen, for compiling an operation recipe which includes the plurality of processes and the like, on a display portion.

"However, in a case in which the user who has the editing authority leaves the apparatus during an editing of the operation recipe or the like, due to circumstances such as dealing with a problem with a high degree of urgency, evacuation due to an activation of an emergency bell, or a physical problem, there is a fear that the operation recipe or the like being displayed on the screen will be edited by a user who does not normally have the operating authority (who is not permitted to do the editing). In the event that the apparatus is operated based on a wrongly edited operation recipe or apparatus parameters, various problems, such as the apparatus receiving damage or a quality of a product deteriorating, will occur."

As a supplement to the background information on this patent, VerticalNews correspondents also obtained the inventors' summary information for this patent: "The invention has an object of providing a substrate processing apparatus which can prevent an inappropriate editing by a user who does not have an editing authority.

"In order to achieve the object, a substrate processing apparatus according to the invention, being a substrate processing apparatus which, executing a compiled or edited recipe, processes a substrate, includes: a display device which displays an editing screen for compiling or editing the recipe, and a controller, which controls in such a way that, in the event that a time set in advance elapses without an operation being carried out on the editing screen displayed by the display device, as well as carrying out a logging out process, and a screen switching process from the editing screen to a prescribed screen which differs from the editing screen, it carries out a deleting process on data edited up to the logging out process, from among data relating to the recipe.

"Preferably, the controller switches from the editing screen to an initial screen.

"Preferably, the controller switches from the editing screen to an authentication screen.

"Preferably, designation devices for carrying out a change of an operating authority and a logging in process are included on the initial screen, and the controller, in the event that the change of the operating authority and the logging in process have been carried out via the designation devices, receives a recipe editing operation.

"Preferably, the controller, in the event that an identifier and a password of a user input via the authentication screen match an identifier and a password of the user stored in advance, receives the recipe editing operation.

"Also, preferably, the controller saves data relating to a recipe partway through editing as a temporary file.

"With the substrate processing apparatus according to the invention, as it does not happen that the user who does not have the editing authority carries out an editing of an operation recipe, apparatus parameters or the like, it is possible to prevent a reduction in quality of a product due to an execution of an unauthorized operation recipe, and damage to the apparatus due to an execution of an unauthorized apparatus parameter."

For additional information on this patent, see: Nogami, Shigeki; Funakura, Mitsuru; Teranishi, Isao; Yashima, Tsukasa; Ekko, Hiroshi. Substrate Processing Apparatus. U.S. Patent Number 8806370, filed October 2, 2007, and published online on August 12, 2014. Patent URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PALL&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.htm&r=1&f=G&l=50&s1=8806370.PN.&OS=PN/8806370RS=PN/8806370

Keywords for this news article include: Electronics, Semiconductor, Hitachi Kokusai Electric Inc..

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Source: Electronics Newsweekly


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