News Column

"Diaphragm-Type Pressure Gauge" in Patent Application Approval Process

August 21, 2014



By a News Reporter-Staff News Editor at Politics & Government Week -- A patent application by the inventor MIYASHITA, Haruzo (Machida-shi, JP), filed on April 3, 2014, was made available online on August 7, 2014, according to news reporting originating from Washington, D.C., by VerticalNews correspondents.

This patent application is assigned to Canon Anelva Corporation.

The following quote was obtained by the news editors from the background information supplied by the inventors: "In a process of manufacturing an electronic component or semiconductor product, thin film formation and etching can be performed in a vacuum apparatus. In the process, the internal pressure of the vacuum apparatus is adjusted to a predetermined pressure. To measure a pressure in a process, a diaphragm-type pressure gauge is often used, which can perform accurate pressure measurement regardless of the type of gas.

"For example, a diaphragm-type pressure gauge having a diaphragm structure like that disclosed in PTL 1 is configured to make a diaphragm electrode deflect in accordance with a pressure. However, since the diaphragm electrode also deflects in the direction of gravitational force, attaching the electrode while it is tilting in the direction of gravitational force will cause an error in a measurement value. In order to correct an error in a measurement value based on the attaching angle of a diaphragm-type pressure gauge, for example, PTL 2 discloses a technique of correcting a measurement value based on the value of a tilt angle."

In addition to the background information obtained for this patent application, VerticalNews journalists also obtained the inventor's summary information for this patent application: "Technical Problem

"However, providing an angle sensor will increase the number of components. In addition, in order to correct a measurement value based on angle information, it is necessary to prepare in advance data concerning changes in the capacitance of a diaphragm electrode depending on tilt angles.

"It is an object of the present invention to provide a technique of more easily solving the problem of a measurement error caused by the deformation of a diaphragm electrode due to the gravitational force.

"Solution to Problem

"A diaphragm-type pressure gauge according to the first aspect of the present invention, is attached to a vessel to be measured and measures a pressure by introducing a gas inside the vessel, and comprises a housing into which the gas is introduced, and a sensor unit which is arranged in the housing, and includes a diaphragm electrode, a measurement surface of which is arranged parallel to an introduction direction of the gas, wherein when the housing is attached to the vessel, the measurement surface of the diaphragm electrode is arranged parallel to the direction of gravitational force.

"A diaphragm-type pressure gauge according to the second aspect of the present invention, is attached to a vessel to be measured and measures a pressure by introducing a gas inside the vessel, and comprises a housing into which the gas is introduced, a sensor unit which is arranged in the housing, and includes a diaphragm electrode, a measurement surface of which is arranged parallel to an introduction direction of the gas, and an attaching portion configured to attach the housing to the vessel so as to make the measurement surface of the diaphragm electrode parallel to the direction of gravitational force.

"A diaphragm-type pressure gauge according to the third aspect of the present invention measures a pressure in a vessel to be measured, and comprises a housing having an internal space communicating with an inside of the vessel, a sensor unit which is arranged in the internal space and includes a fixed electrode and a diaphragm electrode facing the fixed electrode, and an attaching portion configured to attach the housing to the vessel, wherein a measurement surface of the diaphragm electrode which faces the fixed electrode is parallel to a direction in which a gas inside the vessel flows in the internal space, and an outer surface of the housing is provided with a mark with which the diaphragm-type pressure gauge is attached to the vessel so as to make the measurement surface parallel to the direction of gravitational force.

"Advantageous Effects of Invention

"The present invention provides a technique of more easily solving the problem of a measurement error caused by the deformation of a diaphragm electrode due to the gravitational force.

"Other features and advantages of the present invention will be apparent from the following description taken in conjunction with the accompanying drawings. Note that the same reference numerals denote the same or like components throughout the accompanying drawings.

BRIEF DESCRIPTION OF DRAWINGS

"The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate exemplary embodiments of the invention and, together with the description, serve to explain the principles of the present invention.

"FIG. 1 is a schematic view of a diaphragm-type pressure gauge according to an embodiment of the present invention;

"FIG. 2 is a sectional view of a sensor chip assembly according to an embodiment of the present invention;

"FIG. 3 is a perspective view of the sensor chip assembly according to the embodiment of the present invention;

"FIG. 4 is a view showing an example of how the diaphragm-type pressure gauge according to the embodiment of the present invention is attached to a vacuum vessel;

"FIG. 5 is a block diagram showing the system configuration of the diaphragm-type pressure gauge according to the embodiment of the present invention;

"FIG. 6 is a graph showing the relationship between measurement pressures and the digital values of capacitances according to the embodiment of the present invention;

"FIG. 7 is a graph showing the relationship between measurement pressures from the diaphragm-type pressure gauge and the digital values of pressures according to the embodiment of the present invention;

"FIG. 8 is a graph showing the relationship between measurement pressures and I/O output signals; and

"FIG. 9 is a perspective view of a sensor chip assembly according to another embodiment of the present invention."

URL and more information on this patent application, see: MIYASHITA, Haruzo. Diaphragm-Type Pressure Gauge. Filed April 3, 2014 and posted August 7, 2014. Patent URL: http://appft.uspto.gov/netacgi/nph-Parser?Sect1=PTO2&Sect2=HITOFF&u=%2Fnetahtml%2FPTO%2Fsearch-adv.html&r=6812&p=137&f=G&l=50&d=PG01&S1=20140731.PD.&OS=PD/20140731&RS=PD/20140731

Keywords for this news article include: Physics, Gravitational Forces, Canon Anelva Corporation.

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Source: Politics & Government Week


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