News Column

Laboratory, optical and precision equipments (excl. glasses)

July 4, 2014



Contract award: PECVD deposition system.

The PECVD System will be installed in the Micronova Nanofabrication Centre cleanroom, jointly used by VTT and Aalto University for research, development and small-volume production of MEMS- and nanoelectronic devices and materials.

Total final value of contract(s): 460 000 EUR Excluding VAT

Date of contract award decision: 20.3.2014

Contractor name : OXFORD INSTRUMENTS PLASMA TECHNOLOGY



Contractor address : Oxford Instruments Plasma Technology



Implementing agency : Teknologian tutkimuskeskus VTT

P.O. Box 1000

Contact point(s): VTT Technical Research Centre of Finland

For the attention of: Maarit MÄkitalo

FI-02044 VTT

FINLAND

E-mail: maarit.makitalo@vtt.fi



Country :Finland


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Source: TendersInfo (India)


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