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Studies from Sejong University Yield New Information about Algorithms (General algorithm and method for scanning a via hole by using...

August 6, 2014



Studies from Sejong University Yield New Information about Algorithms (General algorithm and method for scanning a via hole by using critical-dimension atomic force microscopy)

By a News Reporter-Staff News Editor at Electronics Newsweekly -- Data detailed on Algorithms have been presented. According to news reporting out of Seoul, South Korea, by VerticalNews editors, research stated, "As semiconductor devices currently are integrated with high density, they are converted into 3-dimensional form. The interconnections between the layers of the devices are linked through via holes which have diameters of a few hundred nanometers and depths on a micrometer scale, typically."

Our news journalists obtained a quote from the research from Sejong University, "This kind of deep via hole scanning in 3 dimension has become a key issue in semiconductor industry. The only non-destructive method to image it directly is critical-dimension atomic force microscopy (CD-AFM) with a long probing tip. The concept of CD-AFM was suggested by other groups, but a substantial scanning algorithm has not been released yet. We suggest an algorithm, which is composed of a raster scanning and a vector scanning, for scanning samples including many via holes."

According to the news editors, the research concluded: "If a feedback scheme with amplitude-detection mode is used, 3-dimensional scanning can be completed within a few conventional raster scannings."

For more information on this research see: General algorithm and method for scanning a via hole by using critical-dimension atomic force microscopy. Journal of the Korean Physical Society, 2014;64(11):1643-1647. Journal of the Korean Physical Society can be contacted at: Korean Physical Soc, 635-4, Yuksam-Dong, Kangnam-Ku, Seoul 135-703, South Korea. (Springer - www.springer.com; Journal of the Korean Physical Society - www.springerlink.com/content/0374-4884/)

Our news journalists report that additional information may be obtained by contacting Y. Seo, Sejong University, Graphene Res Inst, Seoul 143747, South Korea. Additional authors for this research include J.Y. Park, K.B. Kim and N. Lee.

Keywords for this news article include: Asia, Seoul, Algorithms, South Korea, Electronics, Semiconductor

Our reports deliver fact-based news of research and discoveries from around the world. Copyright 2014, NewsRx LLC


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Source: Electronics Newsweekly


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