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Findings on Sensor Research Detailed by Investigators at Research Institute (A Cr-N thin film displacement sensor for precision positioning of a...

July 8, 2014



Findings on Sensor Research Detailed by Investigators at Research Institute (A Cr-N thin film displacement sensor for precision positioning of a micro-stage)

By a News Reporter-Staff News Editor at Journal of Technology -- Researchers detail new data in Sensor Research. According to news reporting out of Miyagi, Japan, by VerticalNews editors, research stated, "A Cr-N thin-film displacement sensor with a millimeter-scale measurement range is proposed for nanometric positioning of a developed micro-stage. The sensor was designed in a compact size of 14 mm (L) x 1 mm (W) x 0.1 mm (T)."

Our news journalists obtained a quote from the research from Research Institute, "A leaf spring made of zirconium oxide, which was employed as the support and guideway of the moving plate in the micro-stage, was employed as the substrate of the sensor. The Cr-N thin film was sputtered directly on one side of the leaf spring to form a Wheatstone bridge circuit with four active strain gauges. Based on the finite element method (FEM), it was verified that both tensile and compressive strains could be generated on the same side of the leaf spring. In order to arrange the strain gauges at the appropriate strain areas of the leaf spring, the relationship between the geometric parameters and the strain distribution of the leaf spring was also investigated by FEM."

According to the news editors, the research concluded: "Experimental results have indicated that the developed sensor had a good linearity and a high sensitivity, which would be applicable for detection of the nanometric displacement of the micro-stage."

For more information on this research see: A Cr-N thin film displacement sensor for precision positioning of a micro-stage. Sensors and Actuators A-Physical, 2014;211():89-97. Sensors and Actuators A-Physical can be contacted at: Elsevier Science Sa, PO Box 564, 1001 Lausanne, Switzerland.

Our news journalists report that additional information may be obtained by contacting Y.X. Peng, Res Inst Electromagnet Mat, Sendai, Miyagi 9820807, Japan. Additional authors for this research include S. Ito, Y. Shimizu, T. Azuma, W. Gao and E. Niwa.

Keywords for this news article include: Asia, Japan, Miyagi, Sensor Research

Our reports deliver fact-based news of research and discoveries from around the world. Copyright 2014, NewsRx LLC


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Source: Journal of Technology


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