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Findings from Shanghai Jiao-Tong University Reveals New Findings on Analytical Science

June 13, 2014



By a News Reporter-Staff News Editor at Science Letter -- Research findings on Science are discussed in a new report. According to news reporting originating in Shanghai, People's Republic of China, by NewsRx journalists, research stated, "The fine alignment between a template with nano patterns and a wafer substrate, especially the parallelism between the two surfaces, is critical to Nano Imprint Lithography. A fine alignment system featuring active orientation adjustment which is composed of an imprint unit and a 6-DOF micromanipulator is proposed in this work."

The news reporters obtained a quote from the research from Shanghai Jiao-Tong University, "Deformations of a compact flexure layer caused by imprint loads are measured by four identical force sensors embedded in the imprint unit. The tilt of the flexure layer can thus be eliminated by adjusting the orientation of the 6-DOF micromanipulator. Kinematics and stiffness analysis are then developed, followed by dynamic performance evaluations. Based on the proposed system, an imprint tool is further developed and corresponding experiments are conducted. A saw shape grating pattern with 1.6 mu m linewidth and a lattice pattern with 0.9 mu m period are both imprinted with a minimum feature of 30 nm well reserved on the substrate."

According to the news reporters, the research concluded: "A maximum parallelism error of 14 nm across the template surface is also demonstrated by further section analyses on the imprinted patterns, hence the feasibility and superiority of the proposed method is verified."

For more information on this research see: Design of a fine alignment system featuring active orientation adjustment for nano imprint lithography. Review of Scientific Instruments, 2014;85(3):553-563. Review of Scientific Instruments can be contacted at: Amer Inst Physics, Circulation & Fulfillment Div, 2 Huntington Quadrangle, Ste 1 N O 1, Melville, NY 11747-4501, USA. (American Institute of Physics - www.aip.org/; Review of Scientific Instruments - rsi.aip.org/)

Our news correspondents report that additional information may be obtained by contacting Z.J. Wen, Shanghai Jiao Tong University, State Key Lab Mech Syst & Vibrat, Sch Mech Engn, Shanghai 200240, People's Republic of China. Additional authors for this research include Z.G. Dong, P.K. Liu and H. Ding (see also Science).

Keywords for this news article include: Asia, Science, Shanghai, People's Republic of China

Our reports deliver fact-based news of research and discoveries from around the world. Copyright 2014, NewsRx LLC


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Source: Science Letter


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