The assignee for this patent application is Canon Kabushiki Kaisha.
Reporters obtained the following quote from the background information supplied by the inventors: "The present invention relates to a drawing apparatus that performs drawing on a substrate with a plurality of charged particle beams and a method of manufacturing an article using the drawing apparatus.
"As a drawing apparatus used for manufacturing devices including semiconductor integrated circuits, a drawing apparatus that performs drawing on a substrate with a plurality of charged particle beams has been proposed (Japanese Patent Application Laid-Open No. 9-7538). In such a drawing apparatus, drawing may be performed by main scanning of each charged particle beam and sub scanning of a substrate.
"Increase of the number of charged particle beams used for drawing can be a measure to improve throughput of such a drawing apparatus. However, increase of the number of charged particle beams requires increase of the number of wirings of a blanker array for individually blanking the charged particle beams, which makes it difficult to perform wiring and mounting the blanker array. Therefore, Proc. of SPIE Vol. 7637,76371Z (2010) discusses a method whereby a control signal line is shared by each one of a plurality of columns that is arranged in a blanker, each column is sequentially switched using the control signal lines, and deflectors in each column is sequentially applied with voltage by instruction values for the respective columns.
"In a drawing apparatus, a pattern to be drawn can be formed by grid points or pixels. A dose (i.e., amount of exposure) can be controlled by setting beam irradiation time for each grid point to either one of binary values (i.e., zero or a specified value) and changing arrangement of grid points for which beam irradiation time is set to the specified value. When the method of Proc. of SPIE Vol. 7637,76371Z (2010) (referred to as an active matrix driving system, hereinafter) is employed in a drawing apparatus with a spatial modulation system, positional deviation (displacement) of grid points in a main scan direction is caused between column units of sequentially switched blankers. As a result, positional deviation or a blur (thinning of a line width, for example) is caused in a drawn pattern, accuracy of drawing with respect to drawing data is deteriorated, and yields may be decreased."
In addition to obtaining background information on this patent application, VerticalNews editors also obtained the inventor's summary information for this patent application: "The present invention is beneficial for addressing the above-noted problems with the related art and comprises, for example, a drawing apparatus which is advantageous in fidelity with respect to drawing data while employing the active matrix driving system for a blanker array.
"According to an aspect of the present invention, a drawing apparatus, that performs drawing on a substrate with a plurality of charged particle beams based on first image data associated with a first grid, includes a blanker array including a plurality of columns each including a plurality of blankers, a scanning deflector configured to deflect at least one of the charged particle beams that has not been blanked by the blanker array to cause the deflected beam to scan the substrate in a scan direction, a drive circuit configured to sequentially drive the blanker array with respect to each of the plurality of columns periodically to define a second grid on the substrate that is displaced from the first grid in the scan direction, and a controller configured to generate second image data on the second grid by performing interpolation processing on the first image data associated with the first grid and to control the drive circuit based on the second image data.
"Further features of the present invention will become apparent from the following description of exemplary embodiments with reference to the attached drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
"FIG. 1 illustrates a configuration example of a drawing apparatus.
"FIG. 2 illustrates a raster scan system drawing method.
"FIG. 3 is a view for describing a positional relationship among a plurality of stripe drawing areas.
"FIG. 4 illustrates a configuration example of a drive circuit of a blanker array.
"FIG. 5 illustrates another configuration example of a drive circuit of a blanker array.
"FIGS. 6A, 6B, 6C, 6D, 6E, and 6F are views for describing a drawing method of spatial modulation system.
"FIGS. 7A, 7B, and 7C illustrate examples of arrangement of scanning grids (i.e., pixels) on a substrate.
"FIG. 8 illustrates a data flow of the drawing apparatus.
"FIG. 9A and FIG. 9B respectively illustrate a configuration example and a flowchart for generating control data according to a first exemplary embodiment.
"FIG. 10A and FIG. 10B respectively illustrate a configuration example and a flowchart for generating control data according to a second exemplary embodiment.
"FIG. 11A and FIG. 11B respectively illustrate a configuration example and a flowchart for generating control data according to a third exemplary embodiment.
"FIG. 12A and FIG. 12B respectively illustrate a configuration example and a flowchart for generating control data according to a fourth exemplary embodiment."
For more information, see this patent application: Ito, Hirohito. Drawing Apparatus, and Method of Manufacturing Article. Filed
Keywords for this news article include: Canon Kabushiki Kaisha.
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