News Column

Investigators from National Central University Report New Data on Optical Research

June 24, 2014

By a News Reporter-Staff News Editor at Physics Week -- New research on Optical Research is the subject of a report. According to news reporting originating from Jhongli, Taiwan, by VerticalNews correspondents, research stated, "A new optical monitoring system for rapid and in situ surface roughness measurement of Pt film on silicon is developed in this study. The in-process measurement is achieved by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction."

Our news editors obtained a quote from the research from National Central University, "Platinum (Pt) thin film is selected due to the extensive utilization in semiconductor industry and excellent chemical inertness. The aim of this study was to demonstrate the necessity for adaptive optics (AO) compensation in regions containing room-temperature turbulences. Measurement results of eight Pt films (roughness ranging from 58 to 83 nm) sputtered on top of P-type silicon wafer demonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R-2) of 0.9962 and a trend equation for predicting the surface roughness of Pt thin films is obtained as y = 9E07x(-3.783). Roughness average (Ra) of Pt thin films (x) of can be directly determined from the peak power (y) using the proposed method under dynamic disturbance."

According to the news editors, the research concluded: "Furthermore, the proposed AO-assisted system is in good agreement with stylus method and less than 1.1% error values are obtained for the aforementioned average sample roughness."

For more information on this research see: In situ roughness monitoring of sputtered Pt thin film under dynamic turbulence using adaptive optics. Optik, 2014;125(9):2086-2089. Optik can be contacted at: Elsevier Gmbh, Urban & Fischer Verlag, Office Jena, P O Box 100537, 07705 Jena, Germany. (Elsevier -; Optik -

The news editors report that additional information may be obtained by contacting Y.K. Fuh, Natl Cent Univ, Dept. of Mech Engn, Jhongli 32001, Taoyuan County, Taiwan.

Keywords for this news article include: Asia, Taiwan, Jhongli, Physics, Adaptive Optics, Optical Research

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Source: Physics Week

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