News Column

New Life Science Research Study Findings Have Been Reported by Researchers at University of Science and Technology

June 17, 2014

By a News Reporter-Staff News Editor at Life Science Weekly -- Researchers detail new data in Life Science Research. According to news reporting originating in Jhongli, Taiwan, by NewsRx journalists, research stated, "Temperature control in etching process is important for semiconductor manufacturing technology. However, pressure variations in vacuum chamber results in a change in temperature, worsening the accuracy of the temperature of the wafer and the speed and quality of the etching process."

The news reporters obtained a quote from the research from the University of Science and Technology, "This work develops an adaptive network-based fuzzy inference system (ANFIS) using a field-programmable gate array (FPGA) to improve the effectiveness. The proposed method adjusts every membership function to keep the temperature in the chamber stable."

According to the news reporters, the research concluded: "The improvement of the proposed algorithm is confirmed using a medium vacuum (MV) inductively-coupled plasma-(ICP-) type etcher."

For more information on this research see: Enhanced temperature control method using ANFIS with FPGA. Thescientificworldjournal [electronic Resource], 2014;2014():239261 (see also Life Science Research).

Our news correspondents report that additional information may be obtained by contacting C.W. Huang, Dept. of Electronic Engineering, Chien Hsin University of Science and Technology, Jhongli 320, Taiwan. Additional authors for this research include S.T. Pan, J.T. Zhou and C.Y Chang.

Keywords for this news article include: Asia, Taiwan, Jhongli, Life Science Research.

Our reports deliver fact-based news of research and discoveries from around the world. Copyright 2014, NewsRx LLC

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Source: Life Science Weekly

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