This patent application is assigned to
The following quote was obtained by the news editors from the background information supplied by the inventors: "Embodiments relate to a laser thermal imaging apparatus and a laser thermal imaging method.
"Recently, an organic light emitting diode (OLED) display has received much attention as a display device for displaying images. An organic emission layer included in the OLED display may be formed by using a laser thermal imaging apparatus performing laser induced thermal imaging (LITI).
"The above information disclosed in this Background section is only for enhancement of understanding of the background of the described technology and therefore it may contain information that does not form the prior art that is already known in this country to a person of ordinary skill in the art."
In addition to the background information obtained for this patent application, VerticalNews journalists also obtained the inventors' summary information for this patent application: "Embodiments are directed to a laser thermal imaging apparatus, including a substrate stage configured to receive a substrate, a beam irradiation unit over the substrate stage, the beam irradiation unit being configured to irradiate an alignment laser beam onto an alignment mark of the substrate, and a beam observing unit facing the beam irradiation unit, the substrate stage being interposed between the beam observing unit and the beam irradiation unit, the beam observing unit being configured to observe the alignment laser beam and a shadow of the alignment mark formed by the alignment mark.
"The substrate stage may include a substrate stage hole corresponding to the alignment mark, and the beam observing unit may be positioned corresponding to the substrate stage hole.
"The beam observing unit may include a reflection unit corresponding to the substrate stage hole and reflecting the alignment laser beam in a predetermined direction, an observing camera spaced apart from the reflection unit in the predetermined direction, and an observing lens positioned between the reflection unit and the observing camera, the observing lens being configured to enlarge or reduce the alignment laser beam.
"The beam observing unit may further include a neutral density filter disposed in an irradiation path of the alignment laser beam.
"The apparatus may further include a laser mask interposed between the beam irradiation unit and the substrate stage, the laser mask including an alignment pattern part configured to partition an initial laser beam, irradiated from the beam irradiation unit, into the alignment laser beam.
"The apparatus may further include a mask stage between the beam irradiation unit and the substrate stage, the mask stage being configured to receive the laser mask, and a mask alignment camera on the mask stage, the mask alignment camera being configured to confirm alignment of the laser mask.
"The laser mask may further include an imaging pattern part neighboring the alignment pattern part, the imaging pattern part being configured to partition the initial laser beam into an imaging laser beam that is irradiated to a display area of the substrate.
"A donor film may be disposed on the substrate, the imaging laser beam being configured to irradiate the donor film and thermally image an organic emission layer onto the substrate.
"The donor film may be supported by the substrate stage.
"The laser mask may include a mask main body, the mask main body including the alignment pattern part and the imaging pattern part, and a cover, the cover being positioned between the mask main body and the beam irradiation unit and being configured to selectively cover the alignment pattern part.
"The cover may be configured to slide between an upper region of the alignment pattern part of the mask main body and an outer region of the mask main body.
"The substrate stage may be configured to move in a first direction, a second direction crossing the first direction, and a third direction crossing the first direction and the second direction.
"The apparatus may further include a main stage, the main stage being configured to support the substrate stage and the beam observing unit, and being configured to move in the first direction and the second direction.
"The apparatus may further include a substrate alignment camera on the substrate stage, the substrate alignment camera being configured to confirm alignment of the substrate.
"Embodiments are also directed to a laser thermal imaging method, the method including positioning a substrate, irradiating an alignment laser beam onto an alignment mark of the substrate, observing the alignment laser beam and a shadow of the alignment mark formed by the alignment mark, comparing alignment of the shadow of the alignment mark and the alignment laser beam, and aligning at least one of the substrate and the alignment laser beam.
"The method may further include performing a laser induced thermal imaging operation whereby an imaging laser beam is irradiated onto a donor film to thermally image an organic emission layer onto the substrate using the aligned substrate or alignment laser beam.
BRIEF DESCRIPTION OF THE DRAWINGS
"Features will become apparent to those of skill in the art by describing in detail example embodiments with reference to the attached drawings in which:
"FIG. 1 is a view of a laser thermal imaging apparatus according to a first example embodiment.
"FIG. 2 is a view of a substrate stage side of the laser thermal imaging apparatus shown in FIG. 1.
"FIGS. 3A-3B and FIGS. 4A-4B are views to explain the laser mask shown in FIG. 1.
"FIG. 5 is a flowchart of a laser thermal imaging method according to a second example embodiment.
"FIGS. 6A-6B and FIGS. 7A-7B are views to explain a laser thermal imaging method according to the second example embodiment."
URL and more information on this patent application, see: MYOUNG, Seung-Ho; JEUN, Jin-Hong. Laser Induced Thermal Imaging Apparatus and Laser Induced Thermal Imaging Method. Filed
Keywords for this news article include:
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