News Column

Studies from North Carolina State University Update Current Data on Ozone

May 30, 2014

By a News Reporter-Staff News Editor at Science Letter -- Fresh data on Ozone are presented in a new report. According to news reporting out of Raleigh, North Carolina, by NewsRx editors, research stated, "High throughput spatial atomic layer deposition (ALD) often uses higher reactor pressure than typical batch processes, but the specific effects of pressure on species transport and reaction rates are not fully understood. For aluminum oxide (Al2O3) ALD, water or ozone can be used as oxygen sources, but how reaction pressure influences deposition using ozone has not previously been reported."

Our news journalists obtained a quote from the research from North Carolina State University, "This work describes the effect of deposition pressure, between similar to 2 and 760 Torr, on ALD Al2O3 using TMA and ozone. Similar to reports for pressure dependence during TMA/water ALD, surface reaction saturation studies show self-limiting growth at low and high pressure across a reasonable temperature range. Higher pressure tends to increase the growth per cycle, especially at lower gas velocities and temperatures. However, growth saturation at high pressure requires longer O-3 dose times per cycle. Results are consistent with a model of ozone decomposition kinetics versus pressure and temperature."

According to the news editors, the research concluded: "Quartz crystal microbalance (QCM) results confirm the trends in growth rate and indicate that the surface reaction mechanisms for Al2O3 growth using ozone are similar under low and high total pressure, including expected trends in the reaction mechanism at different temperatures."

For more information on this research see: Atmospheric Pressure Atomic Layer Deposition of Al2O3 Using Trimethyl Aluminum and Ozone. Langmuir, 2014;30(13):3741-3748. Langmuir can be contacted at: Amer Chemical Soc, 1155 16TH St, NW, Washington, DC 20036, USA. (American Chemical Society -; Langmuir -

Our news journalists report that additional information may be obtained by contacting M.B.M. Mousa, North Carolina State University, Dept. of Chem & Biomol Engn, Raleigh, NC 27695, United States. Additional authors for this research include C.J. Oldham and G.N. Parsons (see also Ozone).

Keywords for this news article include: Ozone, Raleigh, Aluminum, Light Metals, United States, North Carolina, Nanotechnology, Emerging Technologies, Atomic Layer Deposition, North and Central America

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Source: Science Letter

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