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United States : VEECO launches APEX GAS MIXING SYSTEM

May 15, 2014

Veeco Instruments Inc. introduced the Apex Gas Mixing System for point-of-use gas mixing. The system generates binary gas mixtures on a single platform for use in semiconductor applications at 20nm and below.

The system improves concentration control, providing tighter process management, increased tool uptime and reduces manufacturing costs. It is optimized for advanced silicon epitaxy applications and other processes requiring low-concentration, high-precision and cost-sensitive gas mixtures.

The Apex system provides control of germane and diborane flux for doped silicon germanium films. The system allows manufacturers to improve real-time process control by a factor of 10 as compared to mixed gas cylinders. This enables users to increase both yield and throughput.

The system reduces production costs by allowing manufacturers to purchase lower-cost, higher-concentration gases, then dilute them at the point of use to cut gas purchase costs by as much as 60%. The total installed base of Piezocon Gas Concentration Sensors is over 3000 sensors worldwide.

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Source: TendersInfo (India)