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Reports Summarize Applied Surface Science Findings from National Institute of Advanced Industrial Science and Technology (NIAIST)

March 7, 2014



By a News Reporter-Staff News Editor at Science Letter -- Fresh data on Science are presented in a new report. According to news reporting out of Ibaraki, Japan, by NewsRx editors, research stated, "In this paper, in situ monitoring of excimer laser irradiation processing is examined for application to the production of thin films of transparent conductive oxides (TCOs) such as tin-doped indium oxide (ITO). Numerical simulations reveal that differences in the thin film state, for example, in the dopant levels, could greatly affect the proper laser fluence, suggesting the importance of in situ monitoring of the excimer laser processing."

Our news journalists obtained a quote from the research from the National Institute of Advanced Industrial Science and Technology (NIAIST), "The thermal emission signals of ITO thin films under irradiation by a pulsed ultraviolet laser were successfully detected in situ with a near-infrared sensor on a nanosecond timescale. Non-monotonic decay of the thermal radiation from the ITO thin films was observed under XeCllaser irradiation above a certain fluence. At this fluence, the surface morphology of the ITO thin films observed by atomic force microscopy changed to a microstructure reflecting melting and solidification."

According to the news editors, the research concluded: "This correspondence between the thermal radiation and morphology suggests that the observed non-monotonic decay was caused by recalescence upon solidification and that the in situ monitoring technique can be used to detect such phase changes."

For more information on this research see: In situ monitoring of excimer laser annealing of tin-doped indium oxide films for the development of a low-temperature fabrication process. Applied Surface Science, 2014;292():1052-1058. Applied Surface Science can be contacted at: Elsevier Science Bv, PO Box 211, 1000 Ae Amsterdam, Netherlands. (Elsevier - www.elsevier.com; Applied Surface Science - www.elsevier.com/wps/product/cws_home/505669)

Our news journalists report that additional information may be obtained by contacting K. Shinoda, Natl Inst Adv Ind Sci & Technol, Flexible Chem Coating Grp, AMRI, Tsukuba, Ibaraki 3058565, Japan. Additional authors for this research include T. Nakajima and T. Tsuchiya (see also Science).

Keywords for this news article include: Asia, Japan, Ibaraki, Science

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Source: Science Letter


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