One year after announcing the industrialization of CEA-Letiís M&NEMS technologies, Tronics has successfully designed and manufactured the first batch of 6DOF MEMS chips, with 3 accelerometers and 3 gyroscopes on a single die. With a die size of less than 4mm2, this 6DOF MEMS chip is one of the smallest in the industry, and further optimization will make it the smallest.
Besides its size advantage, the piezoresistive nanowire based technology significantly decreases power consumption and allows manufacture of all sensor types (accelerometers, gyroscopes, magnetometers, pressure sensor and microphone) using a common process flow.
Tronics used its know-how in DRIE, wafer bonding and
The initial performance results are very promising. The sensitivity, power consumption, and noise characteristics are in line with the design models. This first functional batch is an important milestone towards high volume production. The industrialization work will continue through 2014, with the first commercial samples available in Q4 2014. An ASIC is also being designed and will be available in 2014 to complete the sensor platform.
In addition to the 6DOF device, Tronics has also designed a very compact 9DOF monolithic MEMS. Samples will be available by the end of this year.
Tronics will manufacture medium and large volumes in its European (Grenoble,
The ideal applications for this new generation of inertial devices are those where size and/or power are key: wearable devices, smartphones and tablets.
Tronics is an international, full-service MEMS manufacturer. With wafer fabs in
CEA-Leti, located at the heart of Grenobleís MINATEC innovation campus, is the leading French applied research centre for microelectronics, and for information and healthcare technologies. Providing a unique interface between industry and academic research, it is responsible each year for the development and transfer of innovative technologies in a wide variety of sectors. In addition to Letiís 1,700 employees, there are more than 250 students involved in research activities, which makes Leti a mainspring of innovation expertise. Letiís portfolio of 1,800 families of patents helps strengthen the competitiveness of its industrial partners.
Read the full story at http://www.prweb.com/releases/2014/02/prweb11606113.htm
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