Altatech's new AltaCVD system will be used in HZB's EMIL lab to deposit amorphous silicon (alloys), transparent conductive oxides and ultra-thin dielectrics used in fabricating next-generation solar energy devices. The CVD system will be hosted by the new EMIL building, adjacent to the third-generation storage ring BESSY II. The cluster tool will be directly connected to a state-of-the-art X-ray analytical end-station, which accesses a dedicated beam line from BESSY II. The partner organizations will conduct atomic-layer deposition, plasma-enhanced chemical vapor deposition and physical vapor deposition on substrates ranging from small research samples up to fully industry-compatible six-inch wafers and use EMIL's outstanding analytical capabilities to analyze material and interface properties in between successive processing steps.
"EMIL aims at exploring materials for high-efficiency photovoltaic cells and new catalytic processes for future solar energy generation and storage concepts. We will develop and characterize these materials with basic energy research methods, but prepare them with industrially related methods to ensure rapid industrial implementation," said Prof.
"This order reinforces the AltaCVD system's leadership position in advanced material-deposition applications," said Jean-Luc Delcarri, general manager of
The versatile AltaCVD tool provides the processing flexibility and performance needed for both research projects and volume manufacturing. The platform, which can be configured with up to six chambers, uses single-wafer deposition technology in developing new process integration while safeguarding against unacceptable contamination and defectivity. Altatech's CVD system is designed to deposit thin- and thick-film materials with extremely high uniformity and film-thickness control, key parameters needed for solar, semiconductor and MEMS applications. About Helmholtz-Zentrum Berlin fÜr Materialien und Energie
The Helmholtz-Zentrum Berlin fÜr Materialien und Energie (HZB ) operates and develops large-scale facilities for research with photons (synchrotron beams) and neutrons. The experimental facilities, some of which are unique, are used annually by more than 2,500 guest researchers from universities and other research organizations worldwide. Above all, HZB is known for the unique sample environments that can be created (high magnetic fields, low temperatures). HZB conducts materials research on themes that especially benefit from and are suited to large-scale facilities. Research topics include magnetic materials and functional materials. In the research focus area of solar energy, the development of thin-film solar cells is a priority, while chemical fuels from sunlight are also a vital research theme. HZB has approximately 1,100 employees of whom some 800 work on the Lise-Meitner Campus in Wannsee and 300 on the Wilhelm-Conrad-RÖntgen Campus in Adlershof.
HZB is a member of the
Altatech offers a unique portfolio of equipment for mature and advanced materials deposition and holistic defect inspection. It develops highly efficient, cost-effective inspection and chemical vapor deposition (CVD) technologies used for R&D and manufacturing of semiconductors, LEDs, MEMS and photovoltaic devices.
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