The patent's assignee is
News editors obtained the following quote from the background information supplied by the inventors: "A pressure sensor device having a pressure detection module is described in German Patent Application No. DE 102 28 000 A1. The pressure sensor device described therein is situated in a housing and uses a pressure sensor, in particular a semiconductor pressure sensor, to detect the pressure. This sensor has a sensor diaphragm, which is provided on the upper side with sensing elements, the central section being spanned on the upper side by the sensor diaphragm. The pressure is supplied to the sensor diaphragm through a recess introduced into the rear side of the semiconductor pressure sensor, which is manufactured by reactive ion etching, for example. The semiconductor pressure sensor is soldered with its recess above a pressure channel of a housing part in such a way that the pressure channel and the recess have a direct pressure connection. The sensing elements on the upper side of the semiconductor pressure sensor generate electrical signals upon the application of pressure, which are relayed via electrical connections (for example, bond wires) to a carrier substrate or directly to contact elements. A cover part closes the pressure sensor device. To determine an absolute pressure with low measuring tolerances with the aid of such a pressure sensor device, it is necessary to maintain a constant pressure, ideally a vacuum, a so-called reference vacuum, in the housing on the non-pressurized side of the semiconductor pressure sensor. Therefore, the electrical signals are conducted outward through hermetically sealed, for example, glazed, contact elements. Manufacturing such a pressure sensor device having a reference vacuum in the housing and implementing the hermetically sealed contact elements requires a comparatively large structural volume of the pressure sensor device; in addition, the manufacturing is complex and the hermetic sealing of the contact elements is linked to high costs."
As a supplement to the background information on this patent application, VerticalNews correspondents also obtained the inventors' summary information for this patent application: "An example device in accordance with the present invention may have the advantage that the pressure detection module has smaller dimensions because of its design. If the measuring tolerance is low, contact elements which run outward in a hermetically sealed manner may be omitted, so that the example pressure detection module may be manufactured at low expenditure. The example pressure detection module according to the present invention is usable as a modular component for various applications, whereby costs may also be saved in particular, since a modular and therefore more cost-effective calibration of the pressure detection module is possible before the installation in a pressure sensor device. The pressure detection module may advantageously be fixed in a hermetically sealed way using the flange of its plate-shaped receptacle part on a housing part of a pressure detection device, in particular welded or soldered on.
"According to the present invention, an example pressure detection module is provided, the pressure detection module including a receptacle part for receiving a carrier substrate, the carrier substrate being provided on a first side with a pressure detection unit, the carrier substrate being inserted with a second side, which faces away from the first side, into the receptacle part, and the carrier substrate being fixed with its second side, which faces away from the first side, on a base of a receptacle groove. According to the present invention, in the case of the example pressure detection module, the receptacle part including the receptacle groove and a peripheral flange around the receptacle groove has a plate-shaped design and the base has a contacting opening, through which the contact surfaces of the carrier substrate, which are exposed at the contacting opening, are electrically contactable.
"The arrangement of the pressure detection unit on the first side of the carrier substrate and the ability to contact the carrier substrate on the second side through a contact opening in the base of the receptacle groove advantageously have the effect that the pressure detection module takes up a particularly advantageously small installation space, and the pressure detection module may be manufactured particularly simply and cost-effectively. The flange particularly advantageously allows sealed fixing of the pressure detection module on a support surface of a pressure detection device, particularly preferably a hermetically sealed fixing by welding.
"Advantageous embodiments and refinements of the present invention are made possible by the measures described herein and shown in the figures.
"One particularly advantageous specific embodiment of the present invention results in that at least one electrical and/or electronic component is situated on the second side of the carrier substrate. It is thus advantageously made possible to process the electrical signals of the pressure detection unit in the pressure detection module by way of an application-specific integrated circuit (ASIC), for example. The electromagnetic compatibility (EMC) of the pressure detection module may also particularly advantageously be improved by situating passive components (e.g., capacitors) in the vicinity of the pressure detection device and/or the ASIC.
"In one particularly advantageous specific embodiment, the receptacle part is designed as a metallic deep-drawn part. The flange of the receptacle part is thus particularly advantageously suited for welding or soldering with a metallic counterpart, so that a sealed connection, particularly advantageously a hermetically sealed connection, may be implemented between the receptacle part and a metallic counterpart.
"Because the carrier substrate is a circuit board or a ceramic it is advantageously achieved that the electrical signals of the pressure detection unit and/or of electrical and/or electronic components may be relayed by lines situated on or in the carrier substrate. It is particularly advantageously possible to relay electrical signals from the first side of the carrier substrate to the second side of the carrier substrate through hermetically sealed lines in the carrier substrate. Furthermore, ceramic as the carrier substrate advantageously has a particularly high resistance to aggressive media (for example, exhaust gases having acid and/or basic components in the exhaust system of a motor vehicle or fuels, brake fluid, transmission oil, and the like).
"The carrier substrate may advantageously be fastened with the aid of a sealing material, in particular a sealing adhesive or a solder, on the base of the receptacle groove. The sealing material is particularly advantageously a sealing adhesive and the sealing adhesive is applied between the second side of the carrier substrate and the inner side of the receptacle groove in such a way that the contacting opening provided in the base of the receptacle groove is sealed, in particular hermetically sealed, by the sealing adhesive and the carrier substrate. The pressurized chamber is thus particularly advantageously separated in a sealed way, by the sealing adhesive and the carrier substrate, from the chamber which encloses the contacting opening in the receptacle part. Such a refinement of the present invention particularly advantageously causes a media barrier in the pressure sensor module, in that upon application of fluids to the pressure detection device, i.e., liquids and/or gases, in particular aggressive fluids, the attack area of the aggressive fluids remains restricted to the pressure detection chamber.
"According to an example embodiment of the present invention, the receptacle part may be closed, using a partition diaphragm on its side opposite to the base, the chamber, delimited by the partition diaphragm and the receptacle part, which is sealed by the carrier substrate and the sealing adhesive against the contacting opening in the base, being filled with a liquid, in particular an oil. This advantageously has the effect that the pressure detection device is only indirectly subjected to the medium whose pressure is to be detected, whereby if the pressure of aggressive media is detected, the service life of the pressure detection module is particularly advantageously lengthened. A closable opening is particularly advantageously provided in the base of the receptacle part in this case, through which the liquid, in particular the oil, may be poured into the chamber delimited by the partition diaphragm and the receptacle part. The manufacture of the pressure sensor module is thus particularly advantageously made easier.
"One advantageous refinement of the present invention provides that the pressure detection device includes at least one piezoelectric sensor system applied to the carrier substrate. A semiconductor sensor element is particularly advantageously used for this purpose, since the manufacturing costs are thus particularly low and the pressure detection precision may be kept particularly high. In another advantageous refinement of the present invention, the pressure detection device includes a sensor system having capacitive pressure detection arranged on the carrier substrate. Particularly precise pressure detection is thus advantageously made possible.
"Because the carrier substrate is a ceramic substrate having a ceramic main body and a diaphragm situated on the ceramic main body, and the pressure detection unit includes a capacitive sensor system having a first electrically conductive surface situated on the ceramic main body and a second electrically conductive surface situated on the diaphragm, the carrier substrate and the pressure detection unit advantageously form an integrated unit and the manufacturing costs may thus advantageously be reduced. Particularly advantageously, the pressure detection unit is particularly resistant to aggressive media in this refinement of the present invention, for example, exhaust gases, fuels, and oils, since electrical lines may be situated in a media-resistant way in the ceramic main body and may be led to the second side of the carrier substrate, which is not exposed to media.
"Because a reference vacuum is enclosed in the pressure detection unit, a pressure detection is thus advantageously made possible with low measuring tolerances and at the same time the structural size of the pressure detection module may particularly advantageously be reduced, since a reference vacuum in the housing may be omitted. Such a pressure detection unit is manufactured particularly advantageously as a semiconductor pressure element in PorSi technology, in the case of which a cavity, which contains the reference vacuum, has a thin diaphragm made of silicon, for example, grown over it in the manufacturing process.
"According to the present invention, a pressure sensor device having a pressure detection module according to the present invention may be manufactured in such a way that the pressure sensor device has a housing part, which is provided with a pressure channel and an installation surface enclosing the pressure channel, and a cover part, and the receptacle part of the pressure detection module is installed with the aid of the flange on the support surface of the housing part in such a way that the pressure detection unit directly or indirectly has a pressure connection to the pressure channel. This advantageously has the effect that the pressure detection module may be installed as an integrated component directly at the location at which the pressure is to be measured. The housing part and the cover part may particularly advantageously be designed in a user-specific way, without the pressure detection module having to be changed in design.
"Particularly cost-effective manufacturing for various applications is thus made possible.
"Because the flange of the receptacle part is connected in a sealed way, in particular connected in a hermetically sealed way, to the housing part by welding, soldering, gluing, and/or by interposing a compressible sealing ring, the pressure sensor device is advantageously also usable for moderate pressure applications (approximately 10 bar to 100 bar). Furthermore, aggressive media, whose pressure is to be determined (e.g., exhaust gases, fuels, transmission oil, and the like), particularly advantageously cannot escape from the interior of the pressure sensor device.
"One advantageous refinement of the present invention provides that a cover part electrically contacts the second side of the carrier substrate with the aid of contact elements, the contact elements being electrically conductively connected to plug contacts of the cover part which run outward. Cost-effective and simple installation is thus advantageously made possible. The electrical contacting of the second side of the carrier substrate by spring contacts particularly advantageously causes a tolerance compensation in the case of various operating conditions (in particular in the case of various temperatures) and during the installation and thus advantageously ensures permanent, secure electrical contacting.
"Because the cover part has a peripheral collar, which is supported with its end face on the side of the flange facing away from the housing part and which is fastened to the housing part using a crimp connection on a side of the collar facing away from the end face, on the one hand, the cover part is advantageously permanently captively fixed on the housing part and the electrical contacting of the plug contacts with the exposed contact surfaces 208 of the carrier substrate is thus permanently ensured. On the other hand, if a compressible sealing ring (e.g., an O-ring) is used for the seal between the housing part and the receptacle part, permanent sealing compression of the sealing ring is advantageously achieved by the placement of the end face of the collar on the flange of the receptacle part and the subsequent crimp connection.
BRIEF DESCRIPTION OF THE DRAWINGS
"Exemplary embodiments of the present invention are shown in the figures and are explained in greater detail below.
"FIG. 1a shows a section through a perspective view of one exemplary embodiment of a pressure detection module according to the present invention.
"FIG. 1b shows a view of the contacting opening in the base of the plate-shaped receptacle element from FIG. 1a.
"FIG. 1c shows a view of the side of the exemplary embodiment from FIG. 1a which is opposite to the contacting opening in the base.
"FIG. 1d shows a view according to FIG. 1c without a partition diaphragm, in which the liquid chamber to be filled with liquid is visible.
"FIG. 1e shows a view of the side of another exemplary embodiment of the present invention opposite to the contacting opening in the base, in which no filling with liquid is provided.
"FIG. 2a shows an exterior view of one exemplary embodiment of a pressure sensor device having a housing part and a cover part.
"FIG. 2b shows a cross section of one exemplary embodiment of a pressure sensor device according to FIG. 2a having a pressure detection module according to FIG. 1a installed in the pressure sensor device.
"FIG. 2c shows a detail view of FIG. 2b, in which the pressure detection module is fixed with the aid of an O-ring on the housing part.
"FIG. 2d shows a detail view of another exemplary embodiment of a pressure sensor device, in which the pressure detection module is connected hermetically sealed to the housing part by a welded bond.
"FIG. 3 shows a detail view of another exemplary embodiment of a pressure sensor device, in which the pressure detection device of the pressure detection module is a ceramic pressure sensor."
For additional information on this patent application, see: HABIBI, Masoud; REINHARD,
Keywords for this news article include: Electronics, Semiconductor,
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