News Column

Reports Outline Analytical Science Study Results from Beihang University

February 28, 2014

By a News Reporter-Staff News Editor at Science Letter -- Current study results on Science have been published. According to news reporting originating in Beijing, People's Republic of China, by NewsRx journalists, research stated, "This paper presents the development of a force-decoupled compound parallel alignment stage for nanoimprint lithography. Parallel alignment stage is a critical component of nanoimprint machine to implement the uniform surface contact between the template with predefined micro/nano patterns and the substrate that accepts the patterns."

The news reporters obtained a quote from the research from Beihang University, "A combination of a high-stiffness spherical air bearing and a multi degree-of-freedom flexure-based mechanism is adopted in the parallel alignment stage. Apart from the parallel alignment function, the proposed stage can also endure a large imprinting force (more than 1000 N) but does not cause any damage to the delicate flexure-based mechanism. The stage performance is evaluated to satisfy the alignment requirement through the theoretical modeling and finite element analysis."

According to the news reporters, the research concluded: "Experiments are conducted on the parallel alignment stage to verify its performance on the transferred grating patterns with linewidth of 2.5 mu m. This result demonstrates that the proposed approach can enhance the load capacity of the parallel alignment stage without degrading its alignment accuracy for nanoimprint lithography."

For more information on this research see: A force-decoupled compound parallel alignment stage for nanoimprint lithography. Review of Scientific Instruments, 2013;84(12):578-586. Review of Scientific Instruments can be contacted at: Amer Inst Physics, Circulation & Fulfillment Div, 2 Huntington Quadrangle, Ste 1 N O 1, Melville, NY 11747-4501, USA. (American Institute of Physics -; Review of Scientific Instruments -

Our news correspondents report that additional information may be obtained by contacting X.T. Sun, Beihang Univ, Sch Mech Engn & Automat, Beijing 100191, People's Republic of China. Additional authors for this research include W.H. Chen, R. Zhou, W.J. Chen and J.B. Zhang (see also Science).

Keywords for this news article include: Asia, Beijing, Science, People's Republic of China

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Source: Science Letter

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