Research conducted by PPPL in collaboration with the
The recent technique utilizes electron beams to reach and harden the surface of the masks that are used for printing microchip circuits. More importantly, the beam creates a population of "suprathermal" electrons that produce the plasma chemistry necessary to protect the mask. The energy of these electrons is greater than simple thermal heating could produce -- hence the name "suprathermal." But how the beam electrons transform themselves into this suprathermal population has been a puzzle.
The PPPL and
This discovery could bring still-greater control of the plasma-surface interactions and further increase the number of transistors on integrated circuits. Insights from both numerical simulations and experiments related to beam-plasma instabilities thus portend the development of new plasma sources and the increasingly advanced chips that they fabricate.
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