"TEM analysis is the only method that allows semiconductor manufacturers to fully characterize, understand and control their advanced manufacturing processes, such as three-dimensional and multi-gate devices, at the 20nm node and smaller. Until now, most sample preparation for TEM analysis has used slow, manual processes that break the wafer into multiple hard-to-track and hard-to-handle pieces," states
The ExSolve WTP system is an automated, high-throughput sample preparation system that can prepare site-specific, 20nm thick lamellae on whole wafers up to 300mm in diameter. It is part of a fast, complete workflow that includes TEMLink™, and the Metrios™ TEM. The ExSolve includes FOUP handling and is designed to be located in the fab near the manufacturing line.
The ExSolve WTP workflow addresses the needs of customers that require automated, high-throughput sampling at advanced technology nodes. It complements the capabilities of FEI's Helios NanoLab™ DualBeam™ 1200AT, which provides more flexible, operator-directed, sample preparation methods, along with additional capabilities such as high-resolution scanning electron microscopy (SEM) imaging and analysis.
For more information about the ExSolve WTP workflow, please visit www.FEI.com/ExSolve.
FEI Safe Harbor Statement
This news release contains forward-looking statements that include statements regarding the performance capabilities and benefits of the ExSolve WTP workflow, including TEMLink and the Metrios TEM. Factors that could affect these forward-looking statements include but are not limited to our ability to manufacture, ship, deliver and install the tools or software as expected; failure of the product or technology to perform as expected; unexpected technology problems and challenges; changes to the technology; the inability of FEI, its suppliers or project partners to make the technological advances required for the technology to achieve anticipated results; and the inability of the customer to deploy the tools or develop and deploy the expected new applications. Please also refer to our Form 10-K, Forms 10-Q, Forms 8-K and other filings with the
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